Integrated color defect detection method for polysilicon wafers using machine vision
نویسندگان
چکیده
منابع مشابه
Machine vision for defect detection on silicon wafers
For several real-world problems, the mathematical methods of signal and image processing are most successful when they also incorporate the insight offered by the physics of the problem. Imaging systems are a particularly fertile ground for problems in this class because they deal specifically with the capture of physical scenes and with the reproduction of images on physical devices. Solutions...
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ژورنال
عنوان ژورنال: Advances in Manufacturing
سال: 2014
ISSN: 2095-3127,2195-3597
DOI: 10.1007/s40436-014-0095-9